LINEAR MOTOR CONTROL SYSTEM AND METHOD

摘要

A linear motor control system and method to increase apparent motor stiffness by providing linear motor resistance to perturbations caused by external forces exerted on a slide mass and a base mass. Primary and secondary sensors detect the accelerations of the slide mass and the base mass relative to ground and generate acceleration signals corresponding thereto. A position detector senses the position of the slide mass relative to the base mass and generates a position signal corresponding thereto. A signal processor processes the first and second acceleration signals and the position signal to determine deviations in the position, velocity and acceleration of the slide mass relative to the base mass from selected values caused by the external forces, and to generate a motor control signal to provide linear motor resistance against such deviations.