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发明名称
SEMICONDUCTOR DEVICES AND ITS MANUFACTURING METHOD
摘要
申请公布号
JPH09270462(A)
申请公布日期
1997.10.14
申请号
JP19960077659
申请日期
1996.03.29
申请人
SEIKO EPSON CORP
发明人
TOYAMA YOSHINOBU
分类号
H01L21/28;H01L21/768;H01L29/78;(IPC1-7):H01L21/768
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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