| 摘要 |
PROBLEM TO BE SOLVED: To increase the simulation efficiency by numerically stabilizing the simulation step time Δt even if it is set up rather longer. SOLUTION: Firstly, the impurity profile of a device is inputted, (step 1) then the simulation step time Δt is inputted (step 2). Next, the field distribution in the other time point after the lapse of Δt according to the field distribution, etc., in one time point is estimated so as to compute the field distribution by weighted addition of the field distribution in one time point and the other time point. (step 5) for computing the movement of carrier in the device according to the computed field distribution (step 6) to repeat the computation of the field distribution until the movement of this carrier reaches the constant state (step 7) so as to compute the physical quantity according to the carrier state in this constant state. |
