发明名称 Process for preparing an SOI-member
摘要 A process for preparing a semiconductor member comprises the steps of: forming a member having a non-porous monocrystalline semiconductor region on a porous monocrystalline semiconductor region, bonding the surface of a member of which the surface is constituted of an insulating substance onto the surface of the non-porous monocrystalline semiconductor region, and then removing the porous monocrystalline semiconductor region by etching. <IMAGE>
申请公布号 EP0747935(A3) 申请公布日期 1997.10.01
申请号 EP19960114975 申请日期 1991.08.02
申请人 CANON KABUSHIKI KAISHA 发明人 YONEHARA, TAKAO
分类号 H01L21/762 主分类号 H01L21/762
代理机构 代理人
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