MOISTURE-PROOF BAG WITH WINDOW

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor wafer moisture-proof bag with a window used for visually checking its contents without markedly increasing the moisture permeability and cost. SOLUTION: A moisture-proof bag 10 is equipped with a non-transparent panel 20 formed of moisture-proof material and a window panel 22 formed of partially transparent material. The window panel 22 is joined to the non- transparent panel 20 in a sealed relation. A space where semiconductor wafers are housed is specified with the non-transparent panel 20 and the window panel 22. A moisture-proof material is capable of protecting semiconductor wafers against a moisture attack and has a small moisture penetration speed (0.005g or below/cm<2> /day) small enough to keep semiconductor wafers in the space for a long term.