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发明名称
ION BEAM MACHINING DEVICE
摘要
申请公布号
JPH09245715(A)
申请公布日期
1997.09.19
申请号
JP19960057186
申请日期
1996.03.14
申请人
HITACHI LTD
发明人
ONUKI HISAO;OISHI SEITARO
分类号
H01J37/30;(IPC1-7):H01J37/30
主分类号
H01J37/30
代理机构
代理人
主权项
地址
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