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发明名称	SANKABUTSUCHODENDOSOSHI
摘要
申请公布号	JP2653448(B2)	申请公布日期	1997.09.17
申请号	JP19870321721	申请日期	1987.12.19
申请人	TOSHIBA KK	发明人	TORUN DEIN TAN
分类号	H01L39/22;C30B29/22;H01B12/06;(IPC1-7):H01L39/22	主分类号	H01L39/22
代理机构		代理人
主权项
地址

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