首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
Verfahren und Vorrichtung zur wiederholten Abbildung eines Maskermusters auf einem Substrat
摘要
申请公布号
DE69221340(D1)
申请公布日期
1997.09.11
申请号
DE19926021340
申请日期
1992.01.30
申请人
ASM LITHOGRAPHY B.V., VELDHOVEN, NL
发明人
VAN DEN BRINK, MARINUS AART, NL-5656 AA EINDHOVEN, NL
分类号
G03F7/22;G03F7/20;G03F9/00;H01L21/027;H01L21/30;H01L21/68;(IPC1-7):G03F7/20
主分类号
G03F7/22
代理机构
代理人
主权项
地址
您可能感兴趣的专利
BENEFIT AGENT DELIVERY PARTICLES COMPRISING NON-IONIC POLYSACCHARIDES
BURNER ARRANGEMENT AND BURNER ASSEMBLY
Tunable Laser and Tuning mathod of the same
U-Health Service User Identification System and Method Using RFID tag
Yulgok plum tree propagation method and the method consisting of lush plum tree seedlings Yulgok
METHOD FOR TRANSITIONING BETWEEN INCOMPATIBLE OLEFIN POLYMERIZATION CATALYST SYSTEMS
SUBSTRATE GRIPPER WITH INTEGRATED ELECTRICAL CONTACTS
Equalizer Circuit Using ATT PAD
CENTRIFUGAL SEPARATOR
PROCESS FOR THE SYNTHESIS OF PROPARGYLATED AMINOINDAN DERIVATIVES
METHODS OF INERTING LITHIUM-CONTAINING BATTERIES AND ASSOCIATED CONTAINERS
SURGICAL NEEDLE FOR A SURGICAL SYSTEM WITH OPTICAL RECOGNITION
Site-specific antibody-drug conjugates
Site-specific antibody-drug conjugates
Magnetic propulsion wheelchair
Aircraft airframe assembly
Airframe production
Test apparatus for evaluating solid particle movement during hydrocarbon production, and method thereof
Foil for roof structure and method for covering a roof structure with foil
Cooling apparatus and method
