| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to suck and hold an electronic component in a stable state by forming a first space of a first piston part and second piston parts to couple the first space with an inner nozzle and a second space of the second piston parts and a third piston part to couple the second space with the inner nozzle and by applying a negative pressure to the first and second spaces. SOLUTION: A suction nozzle 34 is put in a state that it is opened in the atmosphere by providing a through hole 43 of a prescribed diameter in one end part of a cylindrical nozzle holder 42 and the suction nozzle 34 is constituted into a structure, wherein air holes 44 and 45, which are used as a first gas flow path for making the negative-pressure air flow on the sidewall of the nozzle 34, and air holes 46 and 47, which are used as a second gas flow path for making the negative-pressure air flow on the sidewall of the nozzle 34, are provided in the sidewall. Spaces 53 and 54, which are used as a first space, are formed of a first piston part 51 and second piston parts 52, which are positioned holding the air holes 44 and 45 between them, and the spaces 53 and 54 are coupled with an inner nozzle 48. Moreover, an internal passageway 19, which is used as a second space, is formed of the piston parts 52, which are positioned holding the air holes 46 and 47 between them, and a nozzle piston 24, which is used as a third piston part, and the passageway 19 is coupled with the nozzle 48. |
