SPECIALTY GAS PURIFICATION SYSTEM

摘要

A method and apparatus are disclosed showing a system for continuous purification of bulk source specialty gases to less than 10 part per billion levels. Corrosive and non-corrosive specialty gases are purified using this system. Depending on whether corrosive or non-corrosive gases are being purified and the contaminants of concern, the purification beds (A) and (B) contain an absorber and/or getter. A dual bed system allows one bed to purify at ambient temperatures while a second bed undergoes regeneration, providing continuous purification for a bulk source specialty gas.