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发明名称
SPIN COATER HEAD
摘要
申请公布号
JPH09225375(A)
申请公布日期
1997.09.02
申请号
JP19960035243
申请日期
1996.02.22
申请人
SEIKO EPSON CORP
发明人
KITAMURA FUMITAKA;NAKAMURA HIDEAKI;MITSUI YUJI
分类号
B05C11/08;(IPC1-7):B05C11/08
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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