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发明名称
Method of forming a plug in a semiconductor device
摘要
申请公布号
GB9712953(D0)
申请公布日期
1997.08.20
申请号
GB19970012953
申请日期
1997.06.19
申请人
HYUNDAI ELECTRONICS INDUSTRIES CO., LTD.
发明人
分类号
H01L21/28;H01L21/768;H01L23/522
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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