发明名称 CMOS gate stack
摘要 A gate structure in a CMOS is fabricated wherein the encapsulation material is self-aligned with the gate conductor and the gate channel. The gate conductor is formed subsequent to the device doping and heat cycles for formulation of the source and drain junction, and is preferably of greater width than the gate.
申请公布号 US5654570(A) 申请公布日期 1997.08.05
申请号 US19950425945 申请日期 1995.04.19
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 AGNELLO, PAUL DAVID
分类号 H01L29/78;H01L21/28;H01L21/8238;H01L27/092;H01L29/423;H01L29/49;(IPC1-7):H01L27/76;H01L29/94;H01L31/062;H01L31/113 主分类号 H01L29/78
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