| 摘要 |
PROBLEM TO BE SOLVED: To provide a photosensitive laminated body maintaining pattern width independently of a temp. change and the increase or decrease of the quantity of exposure energy at the time of exposure and having a high heat margin for PEB(post-exposure-baking) as well as a high margin for holding time after exposure. SOLUTION: A photopolymerizable photosensitive layer and an oxygen isolating layer are successively laminated on a substrate to obtain the objective photosensitive resin laminated body. The oxygen isolating layer consists of polyvinyl acetate resin (a) having an average saponification degree of 70 to <85% and polyvinyl acetate resin (b) having an average saponification degree of 85-100%. The difference between the saponification degrees of the resins (a), (b) is >=5 as absolute value, the added average saponification degree of the resins (a), (b) is 80-90% and the blending ratio of the resin (a) to the resin (b) is 0.25-4. |
