| 摘要 |
PROBLEM TO BE SOLVED: To impart a plurality of characteristics such as bonding characteristics or the like to a screen electrode and to enhance the productivity and characteristics of the electrode by constituting the whole of or a part of the screen electrode by laminating at least two kinds of conductive materials. SOLUTION: In a first screen electrode layer 26-1 and a screen pad part 27 connecting a screen electrode 26 and an external electrical drive circuit, a second screen electrode layer 26-2 is formed to the upper part on the side opposite to the insulating film 25 of the first screen electrode layer 26-1. The first screen electrode layer 26-1 can be formed by using a conductive material such as stainless steel, titanium or tungsten and the second screen electrode layer 26-2 composed of aluminum is formed on the screen pad part 27 of the first screen electrode layer 26-1 by a sputtering method using a mask. The first and second screen electrode layers 26-1, 26-2 are formed in a thickness of 0.5-severalμm by a mask sputtering method. |
