发明名称 Verfahren zur Herstellung von Feldemissionsspitzen
摘要 The proposal is for a process for producing cold emission points in which a plurality of holes (2) is made in an insulating material (1) and then filled with a metal. Metal bodies (3) are thus formed which, owing to the small diameter of the holes (2), form the cold emission points. The typical diameter of the holes (2) is from a few to a few tens of nanometres.
申请公布号 DE19602595(A1) 申请公布日期 1997.07.31
申请号 DE19961002595 申请日期 1996.01.25
申请人 ROBERT BOSCH GMBH, 70469 STUTTGART, DE 发明人
分类号 H01J9/02;(IPC1-7):H01J19/24;H01J9/12;H01L21/311 主分类号 H01J9/02
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