发明名称 |
Verfahren zur Herstellung von Feldemissionsspitzen |
摘要 |
The proposal is for a process for producing cold emission points in which a plurality of holes (2) is made in an insulating material (1) and then filled with a metal. Metal bodies (3) are thus formed which, owing to the small diameter of the holes (2), form the cold emission points. The typical diameter of the holes (2) is from a few to a few tens of nanometres.
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申请公布号 |
DE19602595(A1) |
申请公布日期 |
1997.07.31 |
申请号 |
DE19961002595 |
申请日期 |
1996.01.25 |
申请人 |
ROBERT BOSCH GMBH, 70469 STUTTGART, DE |
发明人 |
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分类号 |
H01J9/02;(IPC1-7):H01J19/24;H01J9/12;H01L21/311 |
主分类号 |
H01J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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