发明名称 |
Manufacturing method for ink jet printer head |
摘要 |
A manufacturing method for an ink jet printer head, includes the steps of: cutting a plurality of channels for forming a plurality of ink chambers, on the upper surface of a substrate composed of a plurality of layers including at least one piezoelectric member polarized across its thickness; forming a pattern resist film covering a portion of the upper surface of the substrate except electrode forming portions on the inner surfaces of the channels and wiring pattern forming portions on the substrate; performing a process for adsorption of Pd on the electrode forming portions and the wiring pattern forming portions after forming the pattern resist film, for example, by performing a sensitizing process of adsorbing Sn on the substrate and next substituting Pd for the Sn, or by performing a catalyzing process of adsorbing a complex compound of Pd on the substrate and next performing an accelerating process of metallizing the complex compound of Pd; separating the pattern resist film; immersing the substrate from which the pattern resist film has been separated into a plating liquid for forming electrodes and wiring patterns; and mounting on the substrate a top plate and a nozzle plate to form the above ink chambers.
|
申请公布号 |
US5649346(A) |
申请公布日期 |
1997.07.22 |
申请号 |
US19960593520 |
申请日期 |
1996.01.30 |
申请人 |
KABUSHIKI KAISHA TEC;TOSHIBA-EMI LIMITED |
发明人 |
KATSUUMI, KAZUSHIGE;MIYAZAWA, TOSHIO;TSUKAMOTO, TOSHIHILO |
分类号 |
B41J2/045;B41J2/055;B41J2/16;(IPC1-7):H01L41/22 |
主分类号 |
B41J2/045 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|