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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09186232(A)
申请公布日期
1997.07.15
申请号
JP19950341637
申请日期
1995.12.27
申请人
NEC CORP
发明人
HAYASHI SHIGERU
分类号
H01L23/522;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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