| 摘要 |
PROBLEM TO BE SOLVED: To save a space by arranging monitor patterns for inspecting semiconductor parameters, scatteringly at a plurality of spots out of the four corners of a chip. SOLUTION: Function pads 2 and monitor patterns 3-6 are arranged on a chip 1 of a semiconductor integrated circuit. Any special space for arranging monitor patterns becomes unnecessary by arranging/scattering the monitor patterns 3-6 at the four corners of a chip 1 where no pads 2 have been arranged. Besides, it becomes possible to have spaces equal to or larger than the size of the pads 2 at the four corners of the chip, if the pads 2 are arranged at positions other than the four corners of the chip 1. |
