ELECTRODE TRIMMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an electrode trimming method with high performance and excellent in mass-productivity by preventing deterioration in the high frequency characteristic of components and circuits or the like because of high insulating resistance of an electrode trimming section in the laser trimming method capable of contactless continuous trimming SOLUTION: The trimmed part of a ceramic substrate is trimmed to a given shape by means of a laser beam while jetting a high pressure gas to the trimmed part. Then a surface alterated layer of the trimmed part of the ceramic substrate is removed by chemical etching and heat treatment is applied to the trimmed ceramic substrate in air to oxidize (3) the altered layer of the trimmed part again. An electrode oxidized layer etching (4) is conducted to remove the oxidized layer of an electrode part. Thus, continuous electrode trimming by means of laser is attained and the mass-productivity is improved.