Controlling the generation of hillocks in liquid crystal devices

摘要

A liquid crystal display device comprises a substrate (1); a first metal layer (2) including an aluminum alloy having a first refractory metal with a first melting temperature over the substrate (1); and a second metal layer (3) including a pure aluminum or an aluminum alloy having a second refractory metal with a second melting temperature lower than the first melting temperature over the first metal layer (2). The above liquid crystal display device of the present invention prevents the occurrence of hillocks on the aluminum gate metal. A method of manufacturing a liquid crystal display device is disclosed including the steps of forming a first metal layer (2) of an aluminum alloy including a refractory metal having a first melting temperature on a substrate (1); and forming a second metal layer (3) of a pure aluminum or an aluminum alloy including a refractory metal having a second melting temperature lower than the first melting temperature on the first metal layer (2). The alloy may contain Ta, Ti, Mo, W, Nb, Zr, V, Si or Cu.