发明名称 |
BOITE DE STOCKAGE D'UN OBJET DESTINE A ETRE PROTEGE D'UNE CONTAMINATION PHYSICO-CHIMIQUE |
摘要 |
A strong, lightweight, highly electrically conductive storage box having a low gas removal rate and preventing the infiltration of external atmospheric gas into said box. The box (1) has plastic walls coated on the inside and/or outside with at least one protective layer (13, 14) made of SiOxNyHt, wherein t is less than x and/or y. Said box is useful for storing silicon wafers. |
申请公布号 |
FR2741328(A1) |
申请公布日期 |
1997.05.23 |
申请号 |
FR19950013720 |
申请日期 |
1995.11.20 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
SPINELLI PHILIPPE;DOCHE CLAUDE;ROSTAING JEAN CHRISTOPHE;COEURET FRANCOIS;SCOTTO D APOLONIA SYLVAIN |
分类号 |
B65D85/86;H01L21/673;(IPC1-7):B65D81/24;C23C16/30;B65D81/20;C23C16/44 |
主分类号 |
B65D85/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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