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发明名称
HEAT TREATER AND METHOD OF HEAT TREATMENT
摘要
申请公布号
JPH09134913(A)
申请公布日期
1997.05.20
申请号
JP19950315916
申请日期
1995.11.09
申请人
TOKYO ELECTRON LTD
发明人
KIDOGUCHI KATSUMI
分类号
H01L21/31;H01L21/316;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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