CHARGED PARTICLE BEAM TRANSFER SYSTEM,申请号JP19950285117-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM TRANSFER SYSTEM
摘要
申请公布号	JPH09129542(A)	申请公布日期	1997.05.16
申请号	JP19950285117	申请日期	1995.11.01
申请人	NIKON CORP	发明人	NAKASUJI MAMORU
分类号	G03F7/20;H01J37/147;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
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