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发明名称
HIGH-FREQUENCY ION SOURCE
摘要
申请公布号
JPH09129152(A)
申请公布日期
1997.05.16
申请号
JP19950303924
申请日期
1995.10.27
申请人
NISSIN ELECTRIC CO LTD
发明人
ANDO YASUNORI
分类号
H01J27/16;H01J37/08;(IPC1-7):H01J27/16
主分类号
H01J27/16
代理机构
代理人
主权项
地址
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