| 摘要 |
PROBLEM TO BE SOLVED: To stably deliver and receive cassettes by setting an inclined angle of the elevating/lowering means of a cassette holding section so that the cassette holding section can be positioned to a first area when the elevating/lowering means is at the lowest position and to a second area when the elevating/ lowering means is at the highest position. SOLUTION: An elevator 13 is installed in a state where the elevator 13 is inclined to the right from the vertical line at an angle of about 30 deg.. When a holding table 12 is raised, therefore, cassettes 14-1 and 14-2 are fed to an area A through the window of a partition plate 11. When the table 12 is lowered, on the other hand, the cassettes 14-1 and 14-2 are fed to another area B through the window of the plate 11. The sensors 19a-1, 19a-2, 19b-1, and 19b-2 of the table 12 detect the presence/absence of glass masks in cassettes. Limit switches 20-1 and 20-2 are provided to the main body of a cassette station 1. The switch 20-1 detects that the table 12 is completely raised and the switch 20-2 detects that the table 12 is completely lowered. |
