APPARATUS OF AIR SHOWER FOR CLEAN-ROOM

摘要

The apparatus simplifies the structure to make the lower part of the air shower chamber in contact with an underground area of a clean room, and make the gas flow smoothly. It comprises a driver(24) for making the gas flow; a filter(25) filtering the gas; a gas storage chamber(26) storing the filtered gas; an intake nozzle(27), installed at an upper part of the air shower chamber(21), supplying the gas; a discharge hole(28), installed at the lower part of the chamber(21), discharging the gas.