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发明名称
摘要
申请公布号	JP2609728(B2)	申请公布日期	1997.05.14
申请号	JP19890268900	申请日期	1989.10.18
申请人		发明人
分类号	H01L29/78;G01R31/26;H01L21/66;H01L29/786;(IPC1-7):H01L21/66	主分类号	H01L29/78
代理机构		代理人
主权项
地址

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