| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for modifying the surface of an article by which the surface is modified by forming a film having desired characteristics on the surface part of an article with tight adhesion, by selectively forming an objective layer of grains, by pounding the surface of the article or the like not only in the case the hardness of the surface of the article to be treated is high but also in the case it has high hardness and to provide a device therefor. SOLUTION: This is a method for modifying the surface of an article in which a gas for a plasma atmosphere is introduced into a vacuum vessel 1 in a prescribed vacuum state, this gas is applied with high frequency electric power and is plasmatized, furthermore, fine grains are introduced into the vessel 1 and are charged into the minus in a plasma atmosphere P, and positive voltage is applied to an article to be treated supporting means 2, by which the fine grains charged into the minus are seized in a sheath formed between the article supporting means 2 and plasma P, which are moreover accelerated toward the supporting means 2, thus the surface of the article S to be treated supported by the supporting means 2 is subjected to modifying treatment, and the device therefor is provided. |
