Gaseinlaßvorrichtung für eine Beschichtungsanlage

摘要

The invention concerns a gas inlet device which comprises a pre-chamber (5) connected to a supply line (11) via a feed throttle (10) which can be closed by a feed valve (13). Gas can be fed into the pre-chamber (5) via a control valve (6) and a control throttle (4). Since the control valve (6) and the feed valve (13) close the pre-chamber from the exterior, only slight pressure variations occur in the pre-chamber (5) during change-over operations. Consequently, the pressure in the pre-chamber (5) can be controlled exactly and the gas flow out of the pre-chamber (5) into the supply line (11) can be adjusted very precisely.