RESISTOR, THERMAL PRINT HEAD AND MANUFACTURE OF THERMAL PRINT HEAD

摘要

PROBLEM TO BE SOLVED: To eliminate variation of resistance value of a heater resistor even when used at a high temperature and realize fine and rapid printing by comprising a resistor mainly of at least one kind selected from groups IVa to VIIa, Si, C and O. SOLUTION: A plurality of heater resistors 3 formed on a supporting substrate 1 are formed as a general formula Mea, Sib, Cc, Od (where, Me is an element consisting of at least one kind selected from a group comprised of groups IVa to VIIa, and a, b, c, d express component ratio (atomic %) and 15<=a<40, 3<=b<=15, 0.1<=c<=30, 35<=d<=80). In the process, the heater resistor 3 is formed by employing a sputtering method by a target material formed of a sintering body formed by sintering powder containing 10 to 50mol% of at least one kind of element selected from a group consisting of groups IVa to VII and 1 to 20mol% of SiC and 1 to 40mol% of SiO2 .