ALIGNER FOR CRYSTAL DISK SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To highly accurately perform the horizontal direction deflection of a laser with less wear. SOLUTION: This exposure device of a crystalline disk substrate for exposing a disk substrate by laser beams formed by the laser is provided with a means for modulating the laser beams for write signal modulation and write strength change by a modulator and deflecting the laser beams in a horizontal direction. In this case, the modulator is constituted so as to form a bent groove by the horizontal direction deflection of the laser beams based on electric signals in addition to an original function which is the modulation of write signals and write strength.