Universaler negativ arbeitender Photoresist,申请号DE19946002232-传众专利搜索

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发明名称	Universaler negativ arbeitender Photoresist
摘要
申请公布号	DE69402232(D1)	申请公布日期	1997.04.30
申请号	DE19946002232	申请日期	1994.01.14
申请人	INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US	发明人	BUNSVOLD, WILLIAM R., POUGHKEEPIE, N.Y. 12603, US;CONLEY, WILLARD E., CORNWALL, N.Y. 12518, US;GELORME, JEFFREY D., PLAINVILLE, CT 06062, US;WOOD, ROBERT L., POUGHKEEPSIE, N.Y. 12603, US;LINEHAN, LEO L., WALDEN, N.Y. 12586, US;SOORIYAKUMARAN, RATNAM, FISHKILL, N.Y. 12524, US;TAI, TSONG-LIN, STORMVILLE, N.Y. 12582, US
分类号	G03F7/004;G03F7/038;G03F7/30;G03F7/38;H01L21/027;(IPC1-7):G03F7/038	主分类号	G03F7/004
代理机构		代理人
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