| 摘要 |
PROBLEM TO BE SOLVED: To improve the balance of characteristics such as resolution, sensitivity and suitability to coating by incorporating a radiation sensitive acid forming agent selected from among specified halocycloalkanesulfonate compds. and halocycloalkenesulfonate compds. and a resin convertible into an alkali-soluble resin when acid-dissociable groups are dissociated or an alkali-soluble resin and a specified compd. SOLUTION: This radiation sensitive resin compsn. contains a radiation sensitive acid forming agent selected from among halocycloalkanesulfonate compds. and halocycloalkenesulfonate compds. represented by the formula and an alkali-insoluble or slightly alkali-soluble resin protected with acid-dissociable groups and convertible into an alkali-soluble resin when the acid-dissociable groups are dissociated or an alkali-soluble resin and a compd. having property of controlling the alkali solubility of the alkali-soluble resin and reducing or losing its controlling action when it is decomposed by an acid. In the formula, Z is a (n+1)-valent cyclic group having a cycloalkyl group, etc., X is halogen, R is a monovalent org. group and (n) is an integer of 1-3. |
