Verfahren und Vorrichtung zur Messung interner Fehler
摘要
<p>A method for measuring internal defects of a specimen, comprising the steps of allowing a finely focused laser beam to be incident into a specimen from its surface and observing the scattered light of the said laser beam from inside the said specimen from the surface of the specimen and in a different direction to the optical axis of incidence of the laser beam. <IMAGE></p>
