发明名称 Method of making a residual gas sensor utilizing a miniature quadrupole array
摘要 The present invention provides a method of manufacturing a gas sensor having multiple quadrupoles formed in an array by positioning a plurality of rods in an array of quadrupoles, forming a glass bead on the rods, positioning a source of electrons proximate to one end of the rods to ionize gas molecules, positioning an electrical lens proximate to the source of electrons to induce ionized gas molecules, positioning a collector proximate to the rods and displaced from the lens to receive the ionized gas molecules, providing electrical connections through the glass bead to the source of electrons, to the lens, to the collector and to the rods, and heating the glass beads formed on a plurality of rods positioned in the array of quadrupoles to grip and hold the rods in a cantilevered position to thereby seal the electrical connections.
申请公布号 US5613294(A) 申请公布日期 1997.03.25
申请号 US19950410083 申请日期 1995.03.24
申请人 FERRAN SCIENTIFIC 发明人 FERRAN, ROBERT J.
分类号 G01N27/62;H01J49/14;H01J49/26;H01J49/42;(IPC1-7):H01R43/00 主分类号 G01N27/62
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