发明名称 POSITIONING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a maintenance-free high-precision positioning device by only a general AC motor without providing any special speed sensor. SOLUTION: The positioning device equipped with a moving body 12 which is guided through a friction contact part, a driving means 16 which drives the moving body 12, a speed detecting means 17 which detects the speed of the moving body 12, a position detecting means 17 which detects the speed of the moving body 12, position detecting means 13 and 14 which detect the position of the moving body 12, a speed control system 4 which controls the speed of the moving body 12 according to a specific speed command signal and the moving speed of the moving body 12, and a position control system 3 which controls the position of the moving body 12 according to a specific position command signal and the position signal of the moving body 12 is equipped with a switching means which switches a 1st positioning mode wherein trapezoid driving by the operation of only the speed control system 4 is performed, a 2nd positioning mode wherein rough positioning is performed by using feedback control by the operation of both the position control system 3 and speed control system 4, and a 3rd positioning mode wherein precise positioning using feedback control by the operation of only the position control part 3 is performed.</p>
申请公布号 JPH0973317(A) 申请公布日期 1997.03.18
申请号 JP19950248265 申请日期 1995.09.04
申请人 CANON INC 发明人 TAKASHIMA TSUNEO
分类号 B23Q15/22;G05D3/12;H01L21/68;(IPC1-7):G05D3/12 主分类号 B23Q15/22
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