| 摘要 |
<p>The present invention provides a three-layer anti-reflective coating, each layer being made of a combination of materials designed to provide the coating with a desired index of refraction. The invention combines two or more materials to form an alloy whose oxide deposit has anti-reflective properties not found in naturally occurring elements. Each layer is designed to have a specific index of refraction that approximates the relation n1n3/n2 = X(nsn0) wherein n1, n2 and n3, respectively, represent the refractive indices of the first, second, and third layers. In this case ns represents the refractive index of the substrate and n0 is the refractive index of air. The first and second layers are formed by reactively sputtering metal alloys in the presence of oxygen to obtain oxide deposits having a predetermined index of refraction. The oxide deposits may be applied to the substrate by physical vapor deposition methods.</p> |
