| 摘要 |
An electrostatically controlled, micromachined micromechanical capacitor having an adjustable, extensive tuning range. One configuration of the microcapacitor consists of a set of rotatable plates (14) adjacent to each other. Another configuration consists of a set of various sized beams or plates adjacent to a common plate or plates. The pairs of plates are rotated or linearly moved relative to each other to provide an adjustable capacitance. The rotation or movement of the plates is caused electrostatically by an application of a DC or low frequency voltage to the respective plates. The signals that are processed by these micromechanical capacitors are typically in the megahertz range and higher. The process for micromachining the micromechanical capacitor is similar to the process utilized in integrated circuit fabrication. |
