摘要 |
An optical waveguide device comprises a low refractive index layer (8) having a refractive index nb, a core layer (6-1, 6-2) having a refractive index nc (where nc> nb) and a cladding layer (9) having a refractive index nc1 (where nc1< nc) formed on a substrate (7). Thermal expansion coefficients of the low refractive index layer (8), the core layer (6-1, 6-2) and the cladding layer (9), respectively, are made substantially equal to each other at respective boundaries. |