Method and apparatus for providing a film on a substrate,申请号GB19970000381-传众专利搜索

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发明名称	Method and apparatus for providing a film on a substrate
摘要
申请公布号	GB9700381(D0)	申请公布日期	1997.02.26
申请号	GB19970000381	申请日期	1997.01.08
申请人	OXFORD PLASMA TECHNOLOGY LTD	发明人
分类号	C23C14/00;C23C14/46;C23C14/50	主分类号	C23C14/00
代理机构		代理人
主权项
地址

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