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发明名称
ETCH END TIME POINT DETECTING METHOD IN SEMICONDUCTOR ELEMENT MANUFACTURING PROCESS
摘要
申请公布号
JPH0945673(A)
申请公布日期
1997.02.14
申请号
JP19960029275
申请日期
1996.02.16
申请人
L JII SEMICON CO LTD
发明人
RI TOUGEN
分类号
H01L21/66;H01L21/302;H01L21/306;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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