MANUFACTURE OF SOFT MAGNET FILM

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method whereby a soft magnetic film of Fe-Si-Al alloy having high saturation magnetic flux density and high permeability can be produced. SOLUTION: In forming a soft magnetic film of an alloy magnetic material made of Fe, Si, Al and other fine elements on a non-magnetic oxide substrate by sputtering, dc sputtering is carried out supplying oxygen gas to the substrate periodically. A process of forming a layer A of magnetic film 50nm thick in the absence of the oxygen gas supply and a layer B of magnetic film 3nm thick in the presence of the oxygen gas supply is repeated to produce a soft magnetic film 3μm thick composed of the layers A and the layers B alternately stacked. The content of oxygen in the layer B of the soft magnetic film is 5-20% by atom, and preferably 11-17% by atom.