| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain the liquid crystal display device at high yield by forming the step shape of the patterning end part of at least one kind of thin film so that plural steps which differ in angle are laminated along the film thickness. SOLUTION: This device has an insulating substrate 101, a 1st thin film 102 having the step shape of the patterning end part, and a 2nd thin film 103 which is formed thereupon. The step shape of the patterning end part of the 1st thin film 102 is formed by laminating the steps which differ in angle along the film thickness. The steps are all forward tapered at <=90 deg. and their forward taper angles gently decrease toward the top surface side of the thin film (angleα>β>γ). Consequently, the final step shape of the patterning end part is so constituted that the angleαof depression between the patterning end step surface of the 1st thin film 102 and the substrate 101 in the interface with the substrate is always larger than the angle of elevation between the patterning end section of the 1st thin film 102 and its surface on the thin film surface.</p> |
