| 摘要 |
PROBLEM TO BE SOLVED: To provide a pick for taking out a substrate for easily and safely taking out the substrate from a substrate cassette. SOLUTION: A pick 1 for taking out substrates 3 from a substrate cassette 2 for housing flexible substrate 3 with a space includes a pair of arms 11 for lifting a site 32 near both edges of the substrate 3 while being arranged below the objective substrate 3 to be taken out being housed in the cassette 2 and a substrate lifting surface 12 of each arm 11 is formed to have a mountain shape in a section which is vertical to the loading/unloading direction for the cassette 2 of the arm 11. |
