发明名称 VIBRATIONAL ANGULAR VELOCITY METER
摘要 PROBLEM TO BE SOLVED: To reduce the area occupied by a vibrational angular velocity meter. SOLUTION: A vibrator 10 and a vibrator 20 are placed on X-axis and Y- axis, respectively. The vibrator 10 and the vibrator 20 are connected to each other via a support board comprising an insulating material at respective joint sites 10T, 20S. Further, the vibrator 10 is supported by a support member 30 at its joint site 10S, while the vibrator 20 is supported by support members 50, 60 at their joint sites 20S, 20T, respectively. A substrate 70 is equipped with a generation circuit for generating driving AC voltage for vibrating the vibrators 10, 20, a detection circuit for detecting a rotational angular velocity, and so on. The vibrators 10, 20 respectively detect a rotational angular velocity of rotations with the X-axis and Y-axis as the center of the rotation.
申请公布号 JPH0921646(A) 申请公布日期 1997.01.21
申请号 JP19950169428 申请日期 1995.07.05
申请人 NIKON CORP 发明人 HATTORI TETSUO;NOMURA TATSUSHI
分类号 G01P9/04;G01C19/56 主分类号 G01P9/04
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