| 摘要 |
PURPOSE: To properly control the amount of discharging heat without needing a number of sensors and corresponding to all parameters influencing discharging by detecting the discharge voltage and discharge current of a circuit, calculating impedance between discharge electrodes from this detected value and correcting a discharging strength thereafter according to a change in the calculated impedance. CONSTITUTION: A detector 27 for detecting the discharge voltage and discharge current of a circuit including a discharge electrode 13 and a discharge power source 15 is provided. The values of a discharge voltage and a discharge current detected by this detector 27 are input to an impedance computing element 28 and impedance between the discharge electrodes is calculated therein. Then, a correction value is calculated by a calculator 33 from the calculated impedance and the target value 31 of a discharge strength, this correction value is added to the previous discharge condition by an adder 35 and the discharge condition of the discharge power source 15 is decided such that the amount of discharged heat is optimal next time. Thus, proper discharge control including the changes of all the parameters influencing discharging is performed. |
