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发明名称
ELECTRON BEAM EXPOSING APPARATUS
摘要
申请公布号
JPH08279454(A)
申请公布日期
1996.10.22
申请号
JP19950083614
申请日期
1995.04.10
申请人
NEC CORP
发明人
NOZUE HIROSHI
分类号
G03F7/20;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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