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发明名称
摘要
申请公布号	JP2538722(B2)	申请公布日期	1996.10.02
申请号	JP19910149013	申请日期	1991.06.20
申请人	HANDOTAI PUROSESU KENKYUSHO KK;ARUKYAN TETSUKU KK;KYANON HANBAI KK	发明人	MAEDA KAZUO;MATSUI FUMYA;NISHIMOTO HIROKO
分类号	H01L21/3105;H01L21/316;H01L21/3205;H01L21/768;(IPC1-7):H01L21/768;H01L21/320	主分类号	H01L21/3105
代理机构		代理人
主权项
地址

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