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发明名称
CHARGED PARTICLE BEAM LITHOGRAPHY METHOD
摘要
申请公布号
JPH08250393(A)
申请公布日期
1996.09.27
申请号
JP19950052514
申请日期
1995.03.13
申请人
JEOL LTD
发明人
OKI HIROBUMI
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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